Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043400 | Movable and removable process kit | Andreas Schmid | 2021-06-22 |
| 10991556 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Sunil Srinivasan, Rajinder Dhindsa, James Rogers | 2021-04-27 |
| 10964584 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Nicholas Michael Kopec, Steven E. Babayan, Douglas R. McAllister +3 more | 2021-03-30 |