| 11127571 |
Peripheral RF feed and symmetric RF return for symmetric RF delivery |
Sang Ki Nam, James Rogers |
2021-09-21 |
| 11069504 |
Creating ion energy distribution functions (IEDF) |
Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus +1 more |
2021-07-20 |
| 11049760 |
Universal process kit |
Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, James Rogers, Vedapuram S. Achutharaman +1 more |
2021-06-29 |
| 10991556 |
Adjustable extended electrode for edge uniformity control |
Olivier Luere, Leonid Dorf, Sunil Srinivasan, James Rogers, Denis M. Koosau |
2021-04-27 |
| 10975469 |
Plasma resistant coating of porous body by atomic layer deposition |
Vahid Firouzdor, Sumanth Banda, Daniel Sang Byun, Dana Marie Lovell |
2021-04-13 |
| 10923321 |
Apparatus and method of generating a pulsed waveform |
Leonid Dorf, Evgeny Kamenetskiy, James Rogers, Olivier Luere, Viacheslav Plotnikov |
2021-02-16 |
| 10916408 |
Apparatus and method of forming plasma using a pulsed waveform |
Leonid Dorf, Evgeny Kamenetskiy, James Rogers, Olivier Luere, Viacheslav Plotnikov |
2021-02-09 |
