Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069504 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Olivier Luere, Olivier Joubert, Philip Allan Kraus, Rajinder Dhindsa +1 more | 2021-07-20 |
| 10923320 | System for tunable workpiece biasing in a plasma reactor | Philip Allan Kraus, Leonid Dorf, Prabu Gopalraja | 2021-02-16 |
| 10904996 | Substrate support with electrically floating power supply | Haitao Wang, Philip Allan Kraus, Vijay D. Parkhe, Daniel Distaso, Christopher A. Rowland +2 more | 2021-01-26 |