Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10923320 | System for tunable workpiece biasing in a plasma reactor | Travis Koh, Philip Allan Kraus, Leonid Dorf | 2021-02-16 | $36,444,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10923320 | System for tunable workpiece biasing in a plasma reactor | Travis Koh, Philip Allan Kraus, Leonid Dorf | 2021-02-16 | $36,444,000 |