Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923320 | System for tunable workpiece biasing in a plasma reactor | Travis Koh, Philip Allan Kraus, Leonid Dorf | 2021-02-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923320 | System for tunable workpiece biasing in a plasma reactor | Travis Koh, Philip Allan Kraus, Leonid Dorf | 2021-02-16 |