| 11170982 |
Methods and apparatus for producing low angle depositions |
Anantha K. Subramani, Praburam Gopal Raja, Steven V. Sansoni, John C. Forster, Yang Guo +5 more |
2021-11-09 |
| 11114282 |
Phased array modular high-frequency source |
Thai Cheng Chua, Christian Amormino, Dmitry A. Dzilno |
2021-09-07 |
| 11081317 |
Modular high-frequency source |
Thai Cheng Chua, Christian Amormino, Hanh Nguyen, Kallol Bera |
2021-08-03 |
| 11069504 |
Creating ion energy distribution functions (IEDF) |
Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Rajinder Dhindsa +1 more |
2021-07-20 |
| 11049694 |
Modular microwave source with embedded ground surface |
Joseph AuBuchon, James D. Carducci, Larry D. Elizaga, Richard Fovell, Thai Cheng Chua |
2021-06-29 |
| 11037764 |
Modular microwave source with local Lorentz force |
Thai Cheng Chua, Mani Subramani |
2021-06-15 |
| 10985009 |
Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources |
Lakmal C. Kalutarage, Mark Saly, David Thompson, William J. Durand, Kelvin Chan +1 more |
2021-04-20 |
| 10957565 |
Processing tool having a monitoring device |
Shimin Mao, Simon Huang, Ashish Goel, Anantha K. Subramani |
2021-03-23 |
| 10943768 |
Modular high-frequency source with integrated gas distribution |
Hanh Nguyen, Thai Cheng Chua |
2021-03-09 |
| 10937678 |
Substrate support with multiple embedded electrodes |
Thai Cheng Chua, Jaeyong Cho |
2021-03-02 |
| 10923320 |
System for tunable workpiece biasing in a plasma reactor |
Travis Koh, Leonid Dorf, Prabu Gopalraja |
2021-02-16 |
| 10903056 |
Plasma source for rotating susceptor |
Kallol Bera, Anantha K. Subramani, John C. Forster, Farzad Houshmand, Hanhong Chen |
2021-01-26 |
| 10904996 |
Substrate support with electrically floating power supply |
Travis Koh, Haitao Wang, Vijay D. Parkhe, Daniel Distaso, Christopher A. Rowland +2 more |
2021-01-26 |
