Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127619 | Workpiece carrier for high power with enhanced edge sealing | Kartik Ramaswamy, Chunlei Zhang, Haitao Wang, Vijay D. Parkhe | 2021-09-21 |
| 11049755 | Semiconductor substrate supports with embedded RF shield | David Benjaminson, Michael H. Grace, Soonam Park, Dmitry Lubomirsky, Nikolai Kalnin +1 more | 2021-06-29 |
| 10965972 | Method for contents playback with continuity and electronic device therefor | Pilsik Choi, Junghwan Ku, Hyun-June Kim | 2021-03-30 |
| 10937678 | Substrate support with multiple embedded electrodes | Philip Allan Kraus, Thai Cheng Chua | 2021-03-02 |
| 10930540 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Hamid Noorbakhsh +3 more | 2021-02-23 |