Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049755 | Semiconductor substrate supports with embedded RF shield | David Benjaminson, Michael H. Grace, Soonam Park, Dmitry Lubomirsky, Jaeyong Cho +1 more | 2021-06-29 |
| 10920320 | Plasma health determination in semiconductor substrate processing reactors | Junghoon Kim, Soonam Park, Tae Seung Cho, Dmitry Lubomirsky | 2021-02-16 |
| 10903052 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Hideo Sugai, Soonam Park, Toan Q. Tran, Dmitry Lubomirsky | 2021-01-26 |