Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920320 | Plasma health determination in semiconductor substrate processing reactors | Junghoon Kim, Soonam Park, Dmitry Lubomirsky, Nikolai Kalnin | 2021-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920320 | Plasma health determination in semiconductor substrate processing reactors | Junghoon Kim, Soonam Park, Dmitry Lubomirsky, Nikolai Kalnin | 2021-02-16 |