| 11195699 |
Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide |
Satoru Kobayashi, Hideo Sugai, Toan Q. Tran, Dmitry Lubomirsky |
2021-12-07 |
| 11195696 |
Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same |
Dongkyu Shin, Sangki Nam, Akira Koshiishi, Kyuhee Han |
2021-12-07 |
| 11062887 |
High temperature RF heater pedestals |
David Benjaminson, Xikun Wang, Dmitry Lubomirsky |
2021-07-13 |
| 11049755 |
Semiconductor substrate supports with embedded RF shield |
David Benjaminson, Michael H. Grace, Dmitry Lubomirsky, Jaeyong Cho, Nikolai Kalnin +1 more |
2021-06-29 |
| 11004661 |
Process chamber for cyclic and selective material removal and etching |
Toan Q. Tran, Junghoon Kim, Dmitry Lubomirsky |
2021-05-11 |
| 10920320 |
Plasma health determination in semiconductor substrate processing reactors |
Junghoon Kim, Tae Seung Cho, Dmitry Lubomirsky, Nikolai Kalnin |
2021-02-16 |
| 10920319 |
Ceramic showerheads with conductive electrodes |
Laksheswar Kalita, Dmitry Lubomirsky, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more |
2021-02-16 |
| 10903052 |
Systems and methods for radial and azimuthal control of plasma uniformity |
Satoru Kobayashi, Hideo Sugai, Nikolai Kalnin, Toan Q. Tran, Dmitry Lubomirsky |
2021-01-26 |
