Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195699 | Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Toan Q. Tran, Dmitry Lubomirsky | 2021-12-07 |
| 11195696 | Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same | Dongkyu Shin, Sangki Nam, Akira Koshiishi, Kyuhee Han | 2021-12-07 |
| 11062887 | High temperature RF heater pedestals | David Benjaminson, Xikun Wang, Dmitry Lubomirsky | 2021-07-13 |
| 11049755 | Semiconductor substrate supports with embedded RF shield | David Benjaminson, Michael H. Grace, Dmitry Lubomirsky, Jaeyong Cho, Nikolai Kalnin +1 more | 2021-06-29 |
| 11004661 | Process chamber for cyclic and selective material removal and etching | Toan Q. Tran, Junghoon Kim, Dmitry Lubomirsky | 2021-05-11 |
| 10920320 | Plasma health determination in semiconductor substrate processing reactors | Junghoon Kim, Tae Seung Cho, Dmitry Lubomirsky, Nikolai Kalnin | 2021-02-16 |
| 10920319 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Dmitry Lubomirsky, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2021-02-16 |
| 10903052 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Hideo Sugai, Nikolai Kalnin, Toan Q. Tran, Dmitry Lubomirsky | 2021-01-26 |