Soonam Park — 8 Patents at Applied Materials

Issued Patents 2021

Showing 1–8 of 8 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
11195699	Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide	Satoru Kobayashi, Hideo Sugai, Toan Q. Tran, Dmitry Lubomirsky	2021-12-07	$82,478,000
11195696	Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same	Dongkyu Shin, Sangki Nam, Akira Koshiishi, Kyuhee Han	2021-12-07
11062887	High temperature RF heater pedestals	David Benjaminson, Xikun Wang, Dmitry Lubomirsky	2021-07-13	$86,517,000
11049755	Semiconductor substrate supports with embedded RF shield	David Benjaminson, Michael H. Grace, Dmitry Lubomirsky, Jaeyong Cho, Nikolai Kalnin +1 more	2021-06-29	$47,858,000
11004661	Process chamber for cyclic and selective material removal and etching	Toan Q. Tran, Junghoon Kim, Dmitry Lubomirsky	2021-05-11	$77,987,000
10920320	Plasma health determination in semiconductor substrate processing reactors	Junghoon Kim, Tae Seung Cho, Dmitry Lubomirsky, Nikolai Kalnin	2021-02-16	$36,444,000
10920319	Ceramic showerheads with conductive electrodes	Laksheswar Kalita, Dmitry Lubomirsky, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more	2021-02-16	$36,444,000
10903052	Systems and methods for radial and azimuthal control of plasma uniformity	Satoru Kobayashi, Hideo Sugai, Nikolai Kalnin, Toan Q. Tran, Dmitry Lubomirsky	2021-01-26	$35,448,000