Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195696 | Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same | Sangki Nam, Soonam Park, Akira Koshiishi, Kyuhee Han | 2021-12-07 |