Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195696 | Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same | Dongkyu Shin, Sangki Nam, Soonam Park, Kyuhee Han | 2021-12-07 |
| 10950414 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Sang Ki Nam, Kwangyoub Heo, Sunggil Kang, Beomjin Yoo, Sungyong Lim +1 more | 2021-03-16 |