Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195696 | Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same | Dongkyu Shin, Sangki Nam, Soonam Park, Akira Koshiishi | 2021-12-07 |
| 11133249 | Semiconductor device | Yeonggil KIM, Jongmin Baek, Wookyung You | 2021-09-28 |
| 10998185 | Substrate cleaning method, substrate cleaning apparatus, and method for fabricating a semiconductor device using the apparatus | Beomjin Yoo, Minhyoung KIM, Wonhyuk Jang, Hoseop Choi, Jeongmin Bang | 2021-05-04 |