Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998185 | Substrate cleaning method, substrate cleaning apparatus, and method for fabricating a semiconductor device using the apparatus | Beomjin Yoo, Minhyoung KIM, Hoseop Choi, Jeongmin Bang, Kyuhee Han | 2021-05-04 |