Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998185 | Substrate cleaning method, substrate cleaning apparatus, and method for fabricating a semiconductor device using the apparatus | Beomjin Yoo, Minhyoung KIM, Wonhyuk Jang, Hoseop Choi, Kyuhee Han | 2021-05-04 |