Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195696 | Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same | Dongkyu Shin, Soonam Park, Akira Koshiishi, Kyuhee Han | 2021-12-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195696 | Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same | Dongkyu Shin, Soonam Park, Akira Koshiishi, Kyuhee Han | 2021-12-07 |