Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127571 | Peripheral RF feed and symmetric RF return for symmetric RF delivery | Rajinder Dhindsa, James Rogers | 2021-09-21 |
| 11107705 | Cleaning solution production systems and methods, and plasma reaction tanks | Beom Jin Yoo, Min Hyoung Kim, Won Hyuk Jang, Kyu-Hee Han, Young Do Kim +1 more | 2021-08-31 |
| 10950414 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Akira Koshiishi, Kwangyoub Heo, Sunggil Kang, Beomjin Yoo, Sungyong Lim +1 more | 2021-03-16 |
| 10901007 | RF sensing apparatus of plasma processing chamber and plasma processing chamber including same | Young Do Kim, Sung Yong LIM, Chan Soo Kang, Do-Hoon Kwon, Min Ju Kim +3 more | 2021-01-26 |