Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139244 | Semiconductor device | Jangho Lee, Jongmin Baek, Wookyung You, Suhyun Bark | 2021-10-05 |
| 11107705 | Cleaning solution production systems and methods, and plasma reaction tanks | Beom Jin Yoo, Min Hyoung Kim, Sang Ki Nam, Won Hyuk Jang, Young Do Kim +1 more | 2021-08-31 |
| 11037872 | Semiconductor devices and methods of manufacturing the same | Jong-Min Baek, Hoon Seok Seo, Sang-Hoon Ahn, Woo Jin Lee | 2021-06-15 |
| 10943824 | Semiconductor device and method of manufacturing the same | Woojin Lee, Hoon Seok Seo, Sanghoon Ahn | 2021-03-09 |
| 10901007 | RF sensing apparatus of plasma processing chamber and plasma processing chamber including same | Young Do Kim, Sung Yong LIM, Chan Soo Kang, Do-Hoon Kwon, Min Ju Kim +3 more | 2021-01-26 |