Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10901007 | RF sensing apparatus of plasma processing chamber and plasma processing chamber including same | Young Do Kim, Sung Yong LIM, Chan Soo Kang, Min Ju Kim, Sang Ki Nam +3 more | 2021-01-26 |