Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10901007 | RF sensing apparatus of plasma processing chamber and plasma processing chamber including same | Young Do Kim, Sung Yong LIM, Do-Hoon Kwon, Min Ju Kim, Sang Ki Nam +3 more | 2021-01-26 |
CK
Chan Soo Kang
Overall (2021): #500,190 of 548,734Top 95%
1
Patents 2021