Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127571 | Peripheral RF feed and symmetric RF return for symmetric RF delivery | Sang Ki Nam, Rajinder Dhindsa | 2021-09-21 |
| 11069504 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus +1 more | 2021-07-20 |
| 11049760 | Universal process kit | Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, Rajinder Dhindsa, Vedapuram S. Achutharaman +1 more | 2021-06-29 |
| 10991556 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Sunil Srinivasan, Rajinder Dhindsa, Denis M. Koosau | 2021-04-27 |
| 10923321 | Apparatus and method of generating a pulsed waveform | Leonid Dorf, Evgeny Kamenetskiy, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2021-02-16 |
| 10916408 | Apparatus and method of forming plasma using a pulsed waveform | Leonid Dorf, Evgeny Kamenetskiy, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2021-02-09 |