Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069504 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Joubert, Philip Allan Kraus, Rajinder Dhindsa +1 more | 2021-07-20 |
| 11049760 | Universal process kit | Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, James Rogers, Rajinder Dhindsa +1 more | 2021-06-29 |
| 10991556 | Adjustable extended electrode for edge uniformity control | Leonid Dorf, Sunil Srinivasan, Rajinder Dhindsa, James Rogers, Denis M. Koosau | 2021-04-27 |
| 10923321 | Apparatus and method of generating a pulsed waveform | Leonid Dorf, Evgeny Kamenetskiy, James Rogers, Rajinder Dhindsa, Viacheslav Plotnikov | 2021-02-16 |
| 10916408 | Apparatus and method of forming plasma using a pulsed waveform | Leonid Dorf, Evgeny Kamenetskiy, James Rogers, Rajinder Dhindsa, Viacheslav Plotnikov | 2021-02-09 |