Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087989 | Cryogenic atomic layer etch with noble gases | Alvaro Garcia de Gorordo, Zhonghua Yao, Sang Wook Park | 2021-08-10 |
| 11049760 | Universal process kit | Olivier Joubert, Jason A. Kenney, James Rogers, Rajinder Dhindsa, Vedapuram S. Achutharaman +1 more | 2021-06-29 |
| 10991556 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Rajinder Dhindsa, James Rogers, Denis M. Koosau | 2021-04-27 |