Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087989 | Cryogenic atomic layer etch with noble gases | Alvaro Garcia de Gorordo, Sunil Srinivasan, Sang Wook Park | 2021-08-10 |
ZY
Zhonghua Yao
Overall (2021): #188,453 of 548,734Top 35%
1
Patents 2021