Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920319 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Soonam Park, Dmitry Lubomirsky, Tien Fak Tan, LokKee Loh +1 more | 2021-02-16 |
| 10910271 | Wafer dicing using femtosecond-based laser and plasma etch | Wei-Sheng Lei, Brad Eaton, Madhava Rao Yalamanchili, Ajay Kumar, James M. Holden | 2021-02-02 |
| 10903054 | Multi-zone gas distribution systems and methods | Kenneth D. Schatz, Alan Tso, Marlin Wijekoon, Dimitri Kioussis | 2021-01-26 |
| 10892198 | Systems and methods for improved performance in semiconductor processing | Chirantha Rodrigo, Suketu Arun Parikh, Tsz Keung Cheung, Satya Gowthami Achanta, Jingchun Zhang +1 more | 2021-01-12 |