Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158540 | Light-absorbing mask for hybrid laser scribing and plasma etch wafer singulation process | Wenguang Li, James S. Papanu, Wei-Sheng Lei, Prabhat Kumar, Ajay Kumar +1 more | 2021-10-26 |
| 10910271 | Wafer dicing using femtosecond-based laser and plasma etch | Wei-Sheng Lei, Madhava Rao Yalamanchili, Saravjeet Singh, Ajay Kumar, James M. Holden | 2021-02-02 |