Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211247 | Water soluble organic-inorganic hybrid mask formulations and their applications | Wenguang Li | 2021-12-28 |
| 11158540 | Light-absorbing mask for hybrid laser scribing and plasma etch wafer singulation process | Wenguang Li, Wei-Sheng Lei, Prabhat Kumar, Brad Eaton, Ajay Kumar +1 more | 2021-10-26 |
| 11011424 | Hybrid wafer dicing approach using a spatially multi-focused laser beam laser scribing process and plasma etch process | Jungrae Park, Zavier Zai Yeong Tan | 2021-05-18 |
| 10903121 | Hybrid wafer dicing approach using a uniform rotating beam laser scribing process and plasma etch process | Jungrae Park, Karthik Balakrishnan | 2021-01-26 |