Issued Patents 2021
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195699 | Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Toan Q. Tran, Soonam Park | 2021-12-07 |
| 11164724 | Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing | Sang Won Kang, Nicholas Celeste, Peter M. Hillman, Douglas B. Hayden, Dongqing Yang | 2021-11-02 |
| 11158527 | Thermal management systems and methods for wafer processing systems | David Benjaminson | 2021-10-26 |
| 11130142 | Showerhead having a detachable gas distribution plate | Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2021-09-28 |
| 11101136 | Process window widening using coated parts in plasma etch processes | Dongqing Yang, Tien Fak Tan, Peter M. Hillman, Lala Zhu, Nitin K. Ingle +2 more | 2021-08-24 |
| 11062887 | High temperature RF heater pedestals | Soonam Park, David Benjaminson, Xikun Wang | 2021-07-13 |
| 11049698 | Dual-channel showerhead with improved profile | — | 2021-06-29 |
| 11049755 | Semiconductor substrate supports with embedded RF shield | David Benjaminson, Michael H. Grace, Soonam Park, Jaeyong Cho, Nikolai Kalnin +1 more | 2021-06-29 |
| 11024486 | Semiconductor processing systems having multiple plasma configurations | Xinglong Chen, Shankar Venkataraman | 2021-06-01 |
| 11004661 | Process chamber for cyclic and selective material removal and etching | Toan Q. Tran, Soonam Park, Junghoon Kim | 2021-05-11 |
| 10964512 | Semiconductor processing chamber multistage mixing apparatus and methods | Mehmet Tugrul Samir, Dongqing Yang | 2021-03-30 |
| 10920319 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Soonam Park, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2021-02-16 |
| 10923367 | Process chamber for etching low K and other dielectric films | Srinivas D. Nemani, Ellie Yieh, Sergey G. Belostotskiy | 2021-02-16 |
| 10920320 | Plasma health determination in semiconductor substrate processing reactors | Junghoon Kim, Soonam Park, Tae Seung Cho, Nikolai Kalnin | 2021-02-16 |
| 10903052 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Hideo Sugai, Nikolai Kalnin, Soonam Park, Toan Q. Tran | 2021-01-26 |