Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164724 | Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing | Nicholas Celeste, Dmitry Lubomirsky, Peter M. Hillman, Douglas B. Hayden, Dongqing Yang | 2021-11-02 |
| 11025552 | Method and device for regulating playing delay and method and device for modifying time scale | Ho-sang Sung, Jong Hyun Kim, Eun-mi Oh, Yaxing Li, Kyung Hun Jung | 2021-06-01 |