Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164724 | Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing | Sang Won Kang, Nicholas Celeste, Dmitry Lubomirsky, Peter M. Hillman, Douglas B. Hayden | 2021-11-02 |
| 11101136 | Process window widening using coated parts in plasma etch processes | Tien Fak Tan, Peter M. Hillman, Lala Zhu, Nitin K. Ingle, Dmitry Lubomirsky +2 more | 2021-08-24 |
| 10964512 | Semiconductor processing chamber multistage mixing apparatus and methods | Mehmet Tugrul Samir, Dmitry Lubomirsky | 2021-03-30 |