Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101136 | Process window widening using coated parts in plasma etch processes | Dongqing Yang, Tien Fak Tan, Peter M. Hillman, Nitin K. Ingle, Dmitry Lubomirsky +2 more | 2021-08-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101136 | Process window widening using coated parts in plasma etch processes | Dongqing Yang, Tien Fak Tan, Peter M. Hillman, Nitin K. Ingle, Dmitry Lubomirsky +2 more | 2021-08-24 |