Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189502 | Showerhead with interlaced gas feed and removal and methods of use | Kallol Bera, Shahid Rauf, James D. Carducci, Anantha K. Subramani | 2021-11-30 |
| 11139150 | Nozzle for multi-zone gas injection assembly | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Bojenna Keating, Samer Banna | 2021-10-05 |
| 11130142 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2021-09-28 |