Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139150 | Nozzle for multi-zone gas injection assembly | Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2021-10-05 |
| 11119051 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Gregory L. Kirk, Abraham Ravid +1 more | 2021-09-14 |
| 10923371 | Metrology system for substrate deformation measurement | Mehdi Vaez-Iravani, Todd Egan, Samer Banna | 2021-02-16 |