Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177136 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal | 2021-11-16 |
| 11171008 | Abatement and strip process chamber in a dual load lock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal | 2021-11-09 |
| 11139150 | Nozzle for multi-zone gas injection assembly | Yan Rozenzon, Kyle Tantiwong, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2021-10-05 |