Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189511 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Dean C. Hruzek, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2021-11-30 |
| 11177136 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Imad Yousif, Aniruddha Pal | 2021-11-16 |
| 11171008 | Abatement and strip process chamber in a dual load lock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Imad Yousif, Aniruddha Pal | 2021-11-09 |
| 11171029 | Electronic device manufacturing load port apparatus, systems, and methods | David Blahnik, Luke Bonecutter, Douglas B. Baumgarten | 2021-11-09 |
| 11081379 | Load port operation in electronic device manufacturing apparatus, systems, and methods | — | 2021-08-03 |
| 11061417 | Selectable-rate bottom purge apparatus and methods | Dean C. Hruzek, Devendra Channappa Holeyannavar, Srinivas Poshatrahalli Gopalakrishna, Lakshmikantha K. Shirahatti, Babu Chinnasamy +1 more | 2021-07-13 |
| 10946406 | Metering apparatus | Martin Reuter | 2021-03-16 |
| 10943788 | Abatement and strip process chamber in a load lock configuration | Martin Jeffrey Salinas, Andrew Nguyen, Jared Ahmad Lee | 2021-03-09 |