Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11189511 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Dean C. Hruzek, Nir Merry, Douglas B. Baumgarten | 2021-11-30 | $50,552,000 |