Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189511 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2021-11-30 |
| 11087998 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, John Mazzocco, Michael Kuchar, Sushant S. Koshti +2 more | 2021-08-10 |
| 11061417 | Selectable-rate bottom purge apparatus and methods | Paul B. Reuter, Devendra Channappa Holeyannavar, Srinivas Poshatrahalli Gopalakrishna, Lakshmikantha K. Shirahatti, Babu Chinnasamy +1 more | 2021-07-13 |
| 11003149 | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls | Michael R. Rice | 2021-05-11 |
| 10971381 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, John Mazzocco, Michael Kuchar, Sushant S. Koshti +2 more | 2021-04-06 |