Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211230 | Gas flow system | Keith A. Miller, Wei Wang, Alexander ERENSTEIN | 2021-12-28 |
| 11170982 | Methods and apparatus for producing low angle depositions | Anantha K. Subramani, Praburam Gopal Raja, Steven V. Sansoni, John C. Forster, Philip Allan Kraus +5 more | 2021-11-09 |
| 11087998 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more | 2021-08-10 |
| 11018036 | Carrier adapter insert apparatus and carrier adapter insert detection methods | Edward Ng, Douglas MacLeod, David Phillips, Ayan Majumdar, Jeffrey C. Hudgens | 2021-05-25 |
| 10998172 | Substrate processing chamber having improved process volume sealing | Ilya Lavitsky, Keith A. Miller | 2021-05-04 |
| 10978276 | Substrate processing apparatus including top reflector above annular lamp assembly | Bharath Swaminathan, Hanbing Wu | 2021-04-13 |
| 10971381 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more | 2021-04-06 |