Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170982 | Methods and apparatus for producing low angle depositions | Anantha K. Subramani, Praburam Gopal Raja, Steven V. Sansoni, Philip Allan Kraus, Yang Guo +5 more | 2021-11-09 |
| 11158489 | Methods and systems to modulate film stress | Tsutomu Tanaka, Ran Liu, Kenichi Ohno, Ning Li, Mihaela Balseanu +2 more | 2021-10-26 |
| 11133155 | Apparatus for depositing metal films with plasma treatment | Daping Yao, Hyman Lam, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more | 2021-09-28 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Keiichi Tanaka, Li-Qun Xia, Tsutomu Tanaka, Dmitry A. Dzilno +4 more | 2021-08-03 |
| 10903056 | Plasma source for rotating susceptor | Kallol Bera, Anantha K. Subramani, Philip Allan Kraus, Farzad Houshmand, Hanhong Chen | 2021-01-26 |