Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133155 | Apparatus for depositing metal films with plasma treatment | Hyman Lam, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more | 2021-09-28 |
| 11059061 | Apparatus for increasing flux from an ampoule | Kenric Choi, Xiaoxiong Yuan, Mei Chang | 2021-07-13 |