Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D938373 | Substrate transfer structure | Jason M. Schaller, Benjamin B. Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka +7 more | 2021-12-14 |
| 11114282 | Phased array modular high-frequency source | Philip Allan Kraus, Thai Cheng Chua, Christian Amormino | 2021-09-07 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Keiichi Tanaka, Li-Qun Xia, Tsutomu Tanaka, Mario David Silvetti +4 more | 2021-08-03 |