Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11173579 | Inner retaining ring and outer retaining ring for carrier head | Hung Chih Chen, Yin Yuan, Samuel Chu-Chiang Hsu, Huanbo Zhang, Gautam Shashank Dandavate | 2021-11-16 |
| 11174553 | Gas distribution assembly for improved pump-purge and precursor delivery | Kenneth Brian Doering, Kevin Griffin | 2021-11-16 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Keiichi Tanaka, Li-Qun Xia, Tsutomu Tanaka, Dmitry A. Dzilno +4 more | 2021-08-03 |