Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11174553 | Gas distribution assembly for improved pump-purge and precursor delivery | Kenneth Brian Doering, Mario David Silvetti | 2021-11-16 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Srinivas Gandikota, Joseph Yudovsky +1 more | 2021-06-22 |
| 10900125 | Apparatus for susceptor temperature verification and methods of use | Joseph Yudovsky | 2021-01-26 |