Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11174551 | Methods for depositing tungsten on halosilane based metal silicide nucleation layers | Kelvin Chan | 2021-11-16 | $84,921,000 |
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2021-08-17 | $63,158,000 |
| 11066743 | Selective atomic layer deposition of ruthenium | Yong Wu, Srinivas Gandikota, Abhijit Basu Mallick | 2021-07-20 | $88,311,000 |
| 11069568 | Ultra-thin diffusion barriers | Susmit Singha Roy, Abhijit Basu Mallick, Srinivas Gandikota | 2021-07-20 | $88,311,000 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota, Joseph Yudovsky +1 more | 2021-06-22 | $66,836,000 |
| 10886172 | Methods for wordline separation in 3D-NAND devices | Ziqing Duan, Abhijit Basu Mallick, Kelvin Chan | 2021-01-05 | $38,335,000 |