Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177136 | Abatement and strip process chamber in a dual loadlock configuration | Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif, Aniruddha Pal | 2021-11-16 |
| 11171008 | Abatement and strip process chamber in a dual load lock configuration | Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif, Aniruddha Pal | 2021-11-09 |
| 11110425 | Gas distribution plate for thermal deposition | Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap, Michael R. Rice | 2021-09-07 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Kevin Griffin, Srinivas Gandikota, Joseph Yudovsky +1 more | 2021-06-22 |
| 10943788 | Abatement and strip process chamber in a load lock configuration | Martin Jeffrey Salinas, Paul B. Reuter, Andrew Nguyen | 2021-03-09 |