Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11169547 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Joseph AuBuchon, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more | 2021-11-09 |
| 11133210 | Dual temperature heater | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Ganesh Balasubramanian, Lipyeow Yap, Jianhua Zhou +1 more | 2021-09-28 |
| 11110425 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Joseph AuBuchon, Dhritiman Subha Kashyap, Michael R. Rice | 2021-09-07 |
| 11098404 | Multi-station chamber lid with precise temperature and flow control | Dhritiman Subha Kashyap, Gopu Krishna, Michael R. Rice | 2021-08-24 |
| 11047043 | Chamber liner for high temperature processing | Ren-Guan Duan, Kalyanjit Ghosh | 2021-06-29 |
| 11017986 | Deposition radial and edge profile tunability through independent control of TEOS flow | Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more | 2021-05-25 |
| 10910238 | Heater pedestal assembly for wide range temperature control | Kaushik Alayavalli, Ajit Balakrishna, Amit Kumar BANSAL, Matthew J. Busche, Juan Carlos Rocha-Alvarez +3 more | 2021-02-02 |
| 10910243 | Thermal management system | Tejas Ulavi, Dhritiman Subha Kashyap | 2021-02-02 |