Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098404 | Multi-station chamber lid with precise temperature and flow control | Dhritiman Subha Kashyap, Sanjeev Baluja, Michael R. Rice | 2021-08-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098404 | Multi-station chamber lid with precise temperature and flow control | Dhritiman Subha Kashyap, Sanjeev Baluja, Michael R. Rice | 2021-08-24 |