Issued Patents 2021
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195734 | Dual load lock chamber | — | 2021-12-07 |
| 11180847 | Atomic layer deposition coatings for high temperature ceramic components | Xiaowei Wu, Jennifer Y. Sun | 2021-11-23 |
| 11169547 | Gas-pulsing-based shared precursor distribution system and methods of use | Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more | 2021-11-09 |
| 11110425 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap | 2021-09-07 |
| 11114284 | Plasma reactor with electrode array in ceiling | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Shahid Rauf, Kallol Bera | 2021-09-07 |
| 11098404 | Multi-station chamber lid with precise temperature and flow control | Dhritiman Subha Kashyap, Gopu Krishna, Sanjeev Baluja | 2021-08-24 |
| 11087998 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more | 2021-08-10 |
| 11049740 | Reconfigurable mainframe with replaceable interface plate | — | 2021-06-29 |
| 11043360 | Gas distribution plate assembly for high power plasma etch processes | James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Richard Fovell, Vijay D. Parkhe | 2021-06-22 |
| 11003149 | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls | Dean C. Hruzek | 2021-05-11 |
| 10971381 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more | 2021-04-06 |
| 10943805 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Jeffrey C. Hudgens, Karuppasamy Muthukamatchi, Nir Merry | 2021-03-09 |