| 11195734 |
Dual load lock chamber |
— |
2021-12-07 |
| 11180847 |
Atomic layer deposition coatings for high temperature ceramic components |
Xiaowei Wu, Jennifer Y. Sun |
2021-11-23 |
| 11169547 |
Gas-pulsing-based shared precursor distribution system and methods of use |
Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more |
2021-11-09 |
| 11110425 |
Gas distribution plate for thermal deposition |
Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap |
2021-09-07 |
| 11114284 |
Plasma reactor with electrode array in ceiling |
Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Shahid Rauf, Kallol Bera |
2021-09-07 |
| 11098404 |
Multi-station chamber lid with precise temperature and flow control |
Dhritiman Subha Kashyap, Gopu Krishna, Sanjeev Baluja |
2021-08-24 |
| 11087998 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more |
2021-08-10 |
| 11049740 |
Reconfigurable mainframe with replaceable interface plate |
— |
2021-06-29 |
| 11043360 |
Gas distribution plate assembly for high power plasma etch processes |
James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Richard Fovell, Vijay D. Parkhe |
2021-06-22 |
| 11003149 |
Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls |
Dean C. Hruzek |
2021-05-11 |
| 10971381 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more |
2021-04-06 |
| 10943805 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
Jeffrey C. Hudgens, Karuppasamy Muthukamatchi, Nir Merry |
2021-03-09 |
