Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189502 | Showerhead with interlaced gas feed and removal and methods of use | Kallol Bera, Shahid Rauf, Vladimir Knyazik, Anantha K. Subramani | 2021-11-30 |
| 11114284 | Plasma reactor with electrode array in ceiling | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Shahid Rauf, Kallol Bera | 2021-09-07 |
| 11101113 | Ion-ion plasma atomic layer etch process | Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Leonid Dorf, Yang Yang | 2021-08-24 |
| 11049694 | Modular microwave source with embedded ground surface | Joseph AuBuchon, Larry D. Elizaga, Richard Fovell, Philip Allan Kraus, Thai Cheng Chua | 2021-06-29 |
| 11043360 | Gas distribution plate assembly for high power plasma etch processes | Kenneth S. Collins, Kartik Ramaswamy, Michael R. Rice, Richard Fovell, Vijay D. Parkhe | 2021-06-22 |
| 11043361 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, Kenneth S. Collins, Shahid Rauf +3 more | 2021-06-22 |