Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175581 | Aromatic resins for underlayers | Sheng Liu, Shintaro Yamada, Li Cui, Suzanne M. Coley, Joshua Kaitz +1 more | 2021-11-16 |
| 11042093 | Gap-filling method | Keren Zhang, Li Cui, Daniel Greene, Shintaro Yamada | 2021-06-22 |
| 10962880 | Radiation-sensitive compositions and patterning and metallization processes | Mitsuru Haga, Shugaku Kushida, Kunio Kainuma | 2021-03-30 |
| 10901316 | Iodine-containing polymers for chemically amplified resist compositions | Emad Aqad, James W. Thackeray | 2021-01-26 |
| 10894848 | Polyarylene resins | Charles R. Kinzie, Daniel Greene, Christopher Gilmore, Ping Ding, Qing Min Wang +1 more | 2021-01-19 |
| 10886119 | Aromatic underlayer | Sheng Liu, Shintaro Yamada | 2021-01-05 |