| 11114284 |
Plasma reactor with electrode array in ceiling |
Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Shahid Rauf, Kallol Bera |
2021-09-07 |
| 11101113 |
Ion-ion plasma atomic layer etch process |
Kartik Ramaswamy, James D. Carducci, Shahid Rauf, Leonid Dorf, Yang Yang |
2021-08-24 |
| 11043360 |
Gas distribution plate assembly for high power plasma etch processes |
James D. Carducci, Kartik Ramaswamy, Michael R. Rice, Richard Fovell, Vijay D. Parkhe |
2021-06-22 |
| 11043361 |
Symmetric VHF source for a plasma reactor |
Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Shahid Rauf +3 more |
2021-06-22 |
| 11043375 |
Plasma deposition of carbon hardmask |
Yang Yang, Eswaranand Venkatasubramanian, Kartik Ramaswamy, Steven Lane, Gonzalo Monroy +2 more |
2021-06-22 |
| 11043387 |
Methods and apparatus for processing a substrate |
Kartik Ramaswamy, Yang Yang, Steven Lane, Gonzalo Monroy, Yue Guo |
2021-06-22 |
